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The thickness-shear vibration of c-axis tilted 430 ZnO thin film, one side of it is contacted with a layer of viscous conductive liquids is analyzed. The frequency equation has been derived from the three-dimensional linear piezoelectricity theory. The effects of conductivity on the shift in the resonant frequency has been analyzed and discussed in detail. By setting the density, the viscous coefficient...
According to the linear piezoelectric theory, the frequency equation of thickness shear vibration is obtained for investigating the ZnO thin film with a layer of viscoelastic media. Fortunately, some useful results are harvested. From these results, we find that the relative resonant frequency significantly increases when the viscous coefficient is in the range of 0–2Ns/m2. The relation between the...
The wireless communication technology demands for smaller size, high frequency, high performance, low energy consumption, and low cost RF components. Current products based on dielectric or SAW resonators are not enough either due to the size or the circuit loss. Film bulk acoustic resonators (FBAR) are the latest technology offering small size and high frequency RF components to the fast growing...
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