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Cluster tools, widely used for wafer fabrication processes, have complex scheduling problems because a tool consists of several single-wafer processing chambers and a robot, and has a number of scheduling constraints. Most scheduling studies on cluster tools have focused on steady cyclic cycles where identical work cycles are repeated. However, as the lot size tends to be smaller, a tool has longer...
Most cluster tool scheduling studies assume identical access times between chambers or do not discuss the impact of access times. However, the optimal scheduling rule and the cycle time can depend on the access times or physical configuration of parallel chambers. Therefore, we examine cyclic scheduling problems for cluster tools that have nonidentical access times. We first develop Petri net models...
Most cluster tool scheduling studies assume identical access times between chambers, or do not discuss impact of the access times although the optimal scheduling rule and the cycle time can depend on the access times or physical configuration of parallel chambers. We examine cyclic scheduling problems for cluster tools that have non-identical access times. We first develop Petri net models of tool...
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