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This paper presents a novel structural piezoresistive pressure sensor with a four-beams-bossed-membrane (FBBM) structure that consisted of four short beams and a central mass to measure micro-pressure. The proposed structure can alleviate the contradiction between sensitivity and linearity to realize the micro measurement with high accuracy. In this study, the design, fabrication and test of the sensor...
This paper presents a novel structural piezoresistive pressure sensor with four-beams-bossed-membrane (FBBM) that consisted of four short beams and a central mass to measure micro-pressure. In this work, the model design, dimensions optimization, and main fabrication processes are involved. The finite element analysis (FEA) is used to study the stress distribution of sensitive elements and deflection...
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