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A novel Parylene-based shape-transferring technique was developed to fabricate 3-D microelectrodes, which fulfilled the requirements of the high-density microelectrode array (MEA) used in retinal prosthesis. A process combining anisotropic and isotropic etching was utilized to form the 3-D silicon-tip array whose shape was transferred to the Parylene C film as a flexible and biocompatible substrate...
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