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The Al doped ZnO thin films were deposited by ultrasonic spray technique. The influence of Al doping on structural, optical and electrical properties of the ZnO thin films was studied. A set of Al doped ZnO (0–3.5wt.%) were deposited at 350°C. Nanocrystalline films with a hexagonal wurtzite structure with a strong (002) preferred orientation were observed after Al doping. The maximum value of grain...
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