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The strength of a thin film deposited on a substrate should be recognized as the strength of a materials system which is made of a film, a substrate and an interface. The macroscopic fracture of this system should be controlled by the strength of the film and the interface, as well as the residual stress and elastic properties in/of the film. We have developed a systematic method of measurement for...
A new method is proposed to measure the toughness of brittle thin films prepared on substrates. By partly etching the substrate under one edge of film, an overhang part of the film projecting out over the edge of substrate was prepared as the specimen to measure the film toughness. Mechanical load was applied on this specimen by pushing down both sides of the notch, which was grooved from the free...
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