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In order to clarify the interactions of ethanol cluster ions with solid surfaces such as Si(100), SiO 2 and Au surfaces, sputtering effects were investigated by changing the acceleration voltage and incident angle (θ) of the cluster ions. The sputtered depth at a normal incidence of θ=0° increased with an increase of the acceleration voltage. The sputtering ratio of Si to SiO 2 was...
Debris, generated form a laser-produced Sn plasma extreme-ultraviolet source for the next generation optical lithography, was investigated by the laser-induced fluorescence (LIF) imaging for Sn atoms and a Faraday cup for ionic species. The sputtering by the fast ions from the plasma was also investigated by the LIF method.
In order to investigate the interactions of ethanol and water cluster ion beams with metal surfaces, titanium (Ti) substrates were irradiated at different acceleration voltages. The sputtered depth increased with increase of the acceleration voltage. The sputtering yield of Ti at an acceleration voltage of 9kV for the ethanol cluster ions was approximately 100 times larger than that by argon (Ar)...
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