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Zinc oxide (ZnO) films were grown on glass substrates with ion-platedGa-doped ZnO (GZO) buffer layers at various substrate temperatures by atmospheric-pressure chemical vapor deposition using Zn powder and water as precursors. All the X-ray diffraction patterns of the ZnO/GZO films were dominated by a ZnO(002) peak, indicating the successful growth of highly c-axis oriented films. The substrate temperature...
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