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We investigated the influence of Al contents on the structural, electrical and optical properties of Al-doped ZnO (AZO) polycrystalline films with the columnar grain structures. In addition, we demonstrated an effective way for achieving improved Hall mobility AZO films at any given Al contents. We deposited 500-nm-thick AZO films on glass substrates at a substrate temperature of 200°C by direct-current...
We have been developing a deposition technology to achieve Al-doped ZnO (AZO) polycrystalline films with a well-defined (0001) orientation. We propose the use of very thin critical layers (CLs) made from Ga-doped ZnO (GZO) films deposited by ion plating with direct-current arc discharge, which strongly affect the orientation of AZO films deposited by direct-current magnetron sputtering. The Al2O3...
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