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Exponentially weighted moving average (EWMA) controllers are the most commonly used run-to-run controllers in the semiconductor industry. Using a linear model, an EWMA controller can be implemented in two different ways: either process gain or process intercept can be updated using EWMA statistics at each run. The most commonly used EWMA controller formulation is to keep the process gain as its off-line...
Exponentially weighted moving average (EWMA) controllers are the most commonly used run-to-run controllers in semiconductor manufacturing. Based on a linear model, an EWMA controller is usually implemented in a way that the process gain is kept as the off-line estimate and the intercept term is updated using an EWMA filter at each run. However, in practice, there are many applications that an EWMA...
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