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Adhesion and friction force between flat Si tip and nano-patterned Si surface have been investigated by atomic force microscopy (AFM) in air and high vacuum conditions (10 −5 Torr) at room temperature (RT) and at 180°C. The pattern consists of parallel grooves realized on a Si(001) single crystal by focused ion beam (FIB) milling. The FIB technique was also used to modify a commercial AFM...
The tribological properties of a nano-patterned Si surface have been investigated in ambient condition by atomic force microscopy (AFM). The pattern, consisting of parallel grooves, was realized on a Si(001) single crystal via focused ion beam (FIB) milling. The same technique was used to modify a commercial Si probe in order to obtain a flat tip, suitable for the tribological characterization of...
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