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X-ray micro/nano tomography is a powerful tool to reveal inside structures of a sample, either an IC chip or a porous material. A challenge in X-ray tomography is to select a correct threshold to ensure the reconstructed models as close to the reality as possible. This paper presents a study to use scanning electron microscope (SEM) images as references for threshold tuning of X-ray micro/nano computed...
The use of scanning electron microscope (SEM) images as references for threshold tuning of X-ray micro/nano computed tomography reconstruction is proposed. In this research, high-resolution SEM images were used to provide a good estimation of the fibre diameter in the surface of gas diffusion layers (GDL) (5-10 mum). The X-ray tomography reconstructed binary images containing 3D information, including...
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