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In our paper, we investigates acoustic properties including temperature coefficient of elasticity (TCE) of fluorine doped silicon oxide (SiOF) films and proposes their application to the temperature compensation of radio frequency (RF) surface acoustic wave (SAW) devices. From the Fourier transform infrared spectroscopy (FT-IR), SiOF films were expected to possess good TCE properties. Then we fabricated...
In our paper, we discuss the temperature coefficient of frequency (TCF) in the structure of SiO2/LiNbO3 overlays. We studied the relationship between TCF and SiO2 film properties measured by Fourier transform infrared spectroscopy (FT-IR) and found that changes to the atomic structure, such as the peak frequency and the Si-O-Si bond angle, correlated to those of the TCF. The TCF in the SAW device...
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