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Sensitivity of piezoelectric ultrasonic microsensors has been enhanced through static deflection control on silicon dioxide diaphragm structures. A precise deflection control process has been developed for fragile SiO2 diaphragms derived from a both-side oxidized normal silicon wafer. The diaphragms have been re-buckled upward without breaking and the sensitivity has been improved by four times on...
Piezoelectric ultrasonic microsensors have been fabricated using sol-gel derived PZT (Pb(Zr,Ti)O3) thin films on micromachined silicon dioxide diaphragms made from a normal silicon wafer instead of the conventional SOI (silicon on insulator) wafer process. The layered structure of the PZT capacitor part on the diaphragm has been modified in order to control the total lateral stress in the diaphragm...
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