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A series of hot (600 °C) and room temperature C + /Al + co-implanted 6H–SiC epitaxial films, under different implantation dose levels and high temperature (1550 °C) post-annealing, were studied by a variety of structural and optical characterization techniques, including secondary ion mass spectroscopy, high resolution X-ray diffraction, Fourier transform infrared reflectance, micro-Raman...
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