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The general model for describing the working process of dry scroll vacuum pump (DSVP) has been presented previously by the author. The working process of DSVP can be simulated by this model. In order to verify the simulated results, the dynamic pressure measurement was introduced to DSVP. The related test and design methods were also discussed. The pressure-orbiting angle diagrams for different suction...
The rarefied gas flows through suction port, scroll clearance and discharge port are treated as leakage of dry scroll vacuum pump (DSVP). The models for predicting the above-mentioned leakage rate were derived in this paper. The model for predicting the heat transfer rate between rarefied gas and working chamber wall was also developed. Then, a general model for describing the working process of DSVP...
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