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A cryogen-free energy-dispersive spectrometer (EDS) using a transition edge sensor (TES) was developed for material analysis. This system can maintain a temperature at 130mK within 30μK, and has good energy resolution (19eV for Mn-Kα) for long-time measurement with a drift in the DC level of less than 0.02eV/min. This system utilizes a dilution refrigerator (φ 272mm×height 572mm) and has a snout (370mm...
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