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In this paper, we address the problem of junction formation with a low temperature processing (≤ 600°C) through Solid Phase Epitaxial Regrowth. We present the main experimental achievements and suggest solutions to optimize the junctions. In particular, atomistic simulations based on kinetic Monte Carlo (kMC) method allow getting insight into the complex physical phenomena that take place during junction...
In this paper we present a predictive simulation capability for dopant diffusion under anisotropic non uniform stress/strain using two different simulation techniques: continuum and atomistic Kinetic Monte Carlo (KMC). Due to the different nature of these techniques, different implementations have been developed. We explain the necessity and show the details of these implementations. The continuum...
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