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Teflon-like thin films were synthesized by ion beam sputtering a teflon target and their structures were studied by XPS and FT-IR. XPS showed that the films consisted mainly of CF 2 bonds, a few C C bonds and C H bonds; FT-IR indicated that the absorption peaks of the thin films consisted of the strongest absorption peak of C F and the characteristic absorption peaks of teflon. These structural...
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