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A novel piezoelectric micromachined ultrasonic transducer (pMUT) array was designed and fabricated using epitaxially grown functional Pb(Zr0.52Ti0.48)O3 (PZT) thin film on Si(111)/γ-Al2O3(111)/SrRuO3(111) substrate for biomedical applications. The crystallographic orientation of PZT film was controlled by the incorporation of epitaxial γ-Al2O3 film on Si substrate. Modal shape of pMUT was analyzed...
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