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This paper reports on the fabrication and measurement of a wine-glass mode micro-mechanical resonator by using silicon-on-insulator (SOI) wafer. We used single crystal Si for disk resonator and poly-Si for electrodes. The thickness and the radius of the disk resonator are 10 mum and 20 mum, respectively. Our resonator shows a resonant frequency of f0=88.5 MHz, a motional resistance of Rx=8.3 MOmega...
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