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In this paper, we present the mechanical modeling of a MEMS electrodynamic microphone using finite element analysis. This new model aims to study the mechanical design of a microphone to predict its dynamic range performance. Two coaxial planar inductors, one external and the other is internal, are used in this microphone design. When the external inductor is flown by a current, it will produce a...
This paper presents convection behavior investigation of CMOS MEMS convective accelerometers using both analytical and FEM techniques. In a first part, a newly developed accelerometer 3D model is used in FEM simulations to model convection behavior as a function of design geometry and temperature. Using various sizes of two different cover shapes, sensitivity reading and its maximum position in cavity...
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