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We discovered naturally collimated beam of surface acoustic wave (SAW) on balls and developed ball SAW sensor. It has an unique advantage of ultra-multiple roundtrips more than 100 turns. We achieved for the first time, sensing range of hydrogen from 10 ppm (0.001%) to 100% with a single sensor element, essential for hydrogen stations fuel cell cars. In this study, we describe the development of a...
One-dimensional movable structures (motion sensors) made from a metal silicide (WSi) core were successfully encapsulated inside a cavity in an interlayer dielectric (SiO2) covered by another metallic layer. The latter half of the fabrication process is the same as to that for the pressure sensor that we previously reported [1]; thus, both sensors can be fabricated simultaneously. As is the case with...
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