The Infona portal uses cookies, i.e. strings of text saved by a browser on the user's device. The portal can access those files and use them to remember the user's data, such as their chosen settings (screen view, interface language, etc.), or their login data. By using the Infona portal the user accepts automatic saving and using this information for portal operation purposes. More information on the subject can be found in the Privacy Policy and Terms of Service. By closing this window the user confirms that they have read the information on cookie usage, and they accept the privacy policy and the way cookies are used by the portal. You can change the cookie settings in your browser.
This paper introduces the new MA8 Gen3 Aligner generation designed specifically for the development of 3D and MEMS packaging technologies. Photolithography on the wafer backside, wafer bonding and replication of microstructures are specific 3D / MEMS processes. They have in common that all of them require precision alignment and often will have to run on ultra-thin wafers. The MA8 Gen3 allows to run...
Set the date range to filter the displayed results. You can set a starting date, ending date or both. You can enter the dates manually or choose them from the calendar.