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Molybdenum (0.5at%) doped indium oxide thin films deposited by spray pyrolysis technique were irradiated by 100MeV O 7+ ions with different fluences of 5×10 11 , 1×10 12 and 1×10 13 ions/cm 2 . Intensity of (222) peak of the pristine film was decreased with increase in the ion fluence. Films irradiated with the maximum ion fluence of 1×10 13 ions/cm...
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