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AlSb polycrystalline thin films were prepared by cosputtering. The structure, morphology and electrical properties of the films are studied. X-ray diffraction results show that the films are AlSb polycrystalline with a face-centered cubic structure. The use of hydrogen in the atmosphere and the higher substrate temperature are beneficial to the grain growth of the AlSb films. The intrinsic AlSb film...
CdS polycrystalline thin films were fabricated by magnetron sputtering and the influence of substrates, sputtering powers, pressures, and substrate temperatures on the structure of thin films is investigated. The films deposited on substrates of glass, quartz, SnO2: F and p-type single silicon are hexagonal phase and they grow preferentially along (002) planes. As the radio-frequency power and substrate...
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