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This paper presents a new microfabrication method for surface ion traps and experimental results with trapped ions. Fabricating ion trap chips is a very formidable task because the top electrodes are vertically spaced more than 10 µm from the bottom electrodes with an indented dielectric layer in the middle. Previous ion traps were fabricated using TEOS timed etch or tungsten sacrificial etch techniques...
The Excimer(combination word of excited state of dimer) UV is the most utilized pre-cleaning process in TFT manufacturing system. It removes many organic impurities on the surface of the TFT Glass as using the Ultra-Violet. Through the Excimer UV lamp, if the UV of 172nm wave is exposed by 172nm, the impurities change into the hydrophile properties. On the contrary, the Excimer UV occur the different...
A numerical method to model the surface of a reflowed square micro- lens is proposed to improve the simulation accuracy of photosensitivity for an image sensor. To verify the proposed method, a reflowed square microlens with base size of 4.8 x 4.8 mum and sag height of 1.55 mum was fabricated and the modelling accuracy was compared and analysed.
A simple and successful design for a half-coaxial-like transmission line using benzo cyclo butene (BCB) is presented. The proposed half-coaxial transmission line was fabricated using a conventional surface micromachining without additional removal of the sacrificial layer. The measured half-coaxial transmission line showed less than 1 dB/cm loss at 20 GHz. Simulated results using CPW modelling are...
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