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The paper investigates the dielectric charging in nanostructured materials already used or potential candidate for insulating films in MEMS capacitive switches. The investigation takes into account the percolation transport through grain boundaries in polycrystalline materials as well as trough nanoparticles, such as carbon nanotubes that are introduced to control the conductivity. The impact on conductivity...
Diamond films are considered as superior dielectric in comparison to Si3N4 for MEMS applications. The present paper provides a detail characterization study of electrical properties of undoped microcrystalline diamond films involving dc and charge/discharge transient analysis over a wide temperature range. The aim of the study is to provide a better insight on the physical mechanisms responsible for...
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