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Miniaturization is introduced as a novel methodology to enhance mass transport in a chemical vapor deposition process. As a result, amorphous carbon formation during the synthesis of single-walled carbon nanotubes (SWNTs) can be deterred. Miniaturization also maintains a laminar flow pattern to ensure a stable growth condition. A system with micrometer-sized reaction chambers has been constructed...
MEMS packaging has become a major manufacturing issue for commercialization. This talk will give a short summary on several MEMS packaging technologies, including an integrated LPCVD nitride bonding process; localized eutectic, fusion and solder bonding processes; RTP (rapid thermal processing) bonding processes; nano-second laser welding process; ultrasonic sealing process; and localized CVD sealing...
Large area synthesis of graphene has been realized on top of a nickel-coated micro platform using the Micro Chemical Vapor Deposition (Micro-CVD) system. The capability of ultra-fast heating and cooling provided by the MEMS platform is crucial for the controlled growth of graphene. Theoretical analysis shows that cooling rate is about 4 orders of magnitude higher than the conventional CVD system....
Bimorph nano actuator fabricated with focused ion beam chemical vapor deposition (FIB- CVD) on MEMS heater is presented. The nano bimorph structure is composed of C14H10 and W(CO)6 and the transferred thermal energy generated from the MEMS heater increases bimorph temperature. Due to the thermal strain mismatch of the two materials, carbon and tungsten, the nano bimorph bends toward C indicating larger...
Nanoscale tweezers are integrated to deep reactive ion etching (DRIE)-processed microelectrodes by localized chemical vapor deposition using focused ion beam (FIB-CVD). The MEMS electrodes for electrostatic actuation of nano tweezers are fabricated on a heavily doped SOI wafer, which works as the interconnecting platform to control nanoscale device from macro-world. Unlike the carbon nano tube (CNT)-based...
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