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We demonstrated fully automated in-line atomic force microscopy (AFM) for local height variation monitoring solution. Two use cases, which are local variation of SADP Fin height and oxide recess height in Fin reveal process and that of Cu nail protrusion and Cu pad recess height in wafer-to-wafer hybrid bonding process were evaluated in order to evaluate in-line AFM capability as a metrology solution...
We demonstrated fully automated in-line atomic force microscopy (AFM) for local height variation monitoring solution. Two use cases, which are local variation of SADP Fin height and oxide recess height in Fin reveal process and that of Cu nail protrusion and Cu pad recess height in wafer-to-wafer hybrid bonding process were evaluated in order to evaluate in-line AFM capability as a metrology solution...
Given the massive early investment needed for the construction of large offshore wind farms, the ROI (return of investment), which can guarantee sufficient profitability, should be secured in advance. The highest priority in terms of determining profitability is to estimate the power production volume of an offshore wind farm based on surveyed wind resources. The maritime measurement of wind resources...
In case of installing a room of a battery for recharging an electric car, it is necessary to have a system to keep the best state of a battery and to control the recharge and discharge of power. This paper is about the measuring module for the status information of a battery and the development of a battery management system to manage individual battery in a room of a battery with 120kWh grade. It...
The paper deals about the method of small particle removal based on laser induced plasma (LIP) shock wave has been recently applied to clean wafers and masks in semiconductor processes. The silica particles of 50 nm removed from EUVL mask layers by high energy LSC without surface damage by controlling the gap distance. High temperature of plasma plume by the focused laser beam caused the surface damage...
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