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CrN and Cr–Cu–N coatings were deposited under different bias by RF magnetron reactive sputtering. The Cr–Cu–N coatings with an ultra-low Cu content of 0.53–2.1at.% were prepared. The influence of Cu content and substrate bias on microstructure and hardness was investigated. With increasing bias both CrN and Cr–Cu–N coatings change the preferred orientation from (220) to (111), then to coexist of (111)...
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