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Two-dimensional (2D) periodic arrays of vertically-aligned SiGe nanorods were successfully produced on (001)Si0.8Ge0.2 virtual substrates by using the polystyrene (PS) nanosphere lithography technique and selective metal-catalytic etching method. The diameter and site of the produced SiGe nanorods were controlled by the RIE-trimmed PS spheres mask used. TEM and electron diffraction analyses results...
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