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Polycrystalline silicon (Poly-Si) films with large grains are successfully fabricated on glasses in a self-assembled RF-biased RF-PECVD tubular system. Both inductively coupled and capacitively coupled RF powers are employed. High purity (99.99%) SiH 4 , H 2 and Ar are introduced as resource gases. All crystalline films obtained in this study exhibit (111)-Si preferred orientation...
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