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In this study, a way of operating a double split-gate resurf stepped oxide (DSGRSO) UMOS has been proposed. The n-drift region is divided into two parts by the double split-gate: the upper one and the lower one, which enhances the resurf active effect and binges in an electric field peak in the middle of the n-drift region, and decreases the width of split-gate trench, resulting in an increase of...
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