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This study analyze the intensity distribution of CL generated in fluorescent thin film by combination of Monte Carlo method and finite difference time domain (FDTD) method. The Monte Carlo method analyzes the electron beam scattering in the fluorescent thin film and FDTD method analyzes the light propagation of CL. From analysis result, the spot size of CL at surface of 50 nm Y2O3: Eu3+ is 43 nm....
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