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TiSiN and TiSiAlN coatings were deposited on M2 steel by a hybrid physical/chemical vapour deposition process. SiH 4 was used as precursor for Si, while metals were brought by arc evaporation. This hybrid process allowed us to control the silicon enrichment along the coating thickness. Both films were synthesized applying a serrated silane partial pressure during deposition, leading to a multilayered...
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