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As an important component of Atomic Force Microscope (AFM), piezo-scanner exhibits some undesired nonlinear characteristics, among which the inherent hysteresis largely decreases the scanning rate and resolution of AFM. To alleviate this problem, an image-based approach is proposed in this paper to model and then compensate for the hysteresis behavior of the piezo-scanner. Specifically, some scanning...
Motivated by increasing the scanning performance of the atomic force microscope (AFM), many efforts have been made to analyze the system behavior of an AFM system, mainly in Z-axis, and then to develop more advanced controllers. However, most of the previously derived models involve complex physical or mathematical analysis, and many parameters need to be identified for actual application. In this...
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