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We present a varifocal mirror integrated with a comb-drive scanner (varifocal scanner) fabricated by using a wafer bonding technology. An Au-Au thermocompression bonding technology is utilized for the integration. The bonding technology enables fabricating the multiple single crystalline Si layers on a wafer. The varifocal scanner consists of the three Si layers: 1) the fixed comb layer; 2) the scanner...
The integration of a varifocal mirror with a scanner using wafer bonding technology is presented. The wafer bonding technology enables us to enlarge the design possibility. A 2 mm diameter varifocal mirror is bonded on the scanner. The optical scanning angle is 7° at 3.59 kHz. The focal length changes from infinity to 139 mm.
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