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We investigated full-epitaxial TiN/AlN/TiN Josephson junctions on MgO substrates for superconducting qubit applications. The critical temperature $(T_{\rm C})$ of TiN film is relatively low at around 5 K, but its lattice constant is about 0.424 nm, which is close to the lattice constant of MgO of 0.421 nm. TiN and AIN films were prepared by DC magnetron sputtering in a load-lock sputtering system...
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