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Composition fluctuations in Al x Ga 1-x N-layers (x=0.25 and 0.35) are investigated on an atomic scale by high-resolution transmission electron microscopy (HRTEM). The samples were grown by plasma induced molecular beam epitaxy on Al 2 O 3 (0001). A strain state analysis of the cross-sectional HRTEM micrographs is performed with the digital analysis of...
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