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This paper presents a new type of dry electrodes for acquisition of biopotentials and stimulation. These dry electrodes are composed by 16 microtip structures (by forming an array of 4×4 microtips), which were fabricated through bulk micromachining of a 〈100〉-type silicon substrate in a potassium hydroxide (KOH) solution. The fabrication process was trimmed in a way that each microtip presents solid...
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