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We demonstrate advanced modeling and optimization of 32nm high-K metal gate (HKMG) SOI CMOS technology for high-speed digital and RF/analog system-on-chip applications. To enable high-performance RF/analog circuit design, we present challenging device modeling features and their enhancements. At nominal Lpoly, floating-body NFET and PFET demonstrate peak fT of 300GHz and fMAX of higher than 350GHz...
The eSiGe layout effect induced by PC-bounded or STI-bounded eSiGe shows impact on device performance and variability increase. For PC-bounded device, performance degradation could be explained by the mobility loss due to reducing eSiGe volume and less stress strength. For STI-bounded device, performance degradation varies, due to strong interaction between eSiGe fill morphology and device overlap...
This work presents a 32 nm SOI CMOS technology featuring high-k/metal gate and an SRAM cell size of 0.149 mum2. Vmin operation down to 0.6 V in a 16 Mb SRAM array test vehicle has been demonstrated. Aggressive ground rules are achieved with 193 nm immersion lithography. High performance is enabled by high-k/metal gate plus innovation on strained silicon elements including embedded SiGe and dual stress...
CMOS devices with high-k/metal gate stacks have been fabricated using a gate-first process flow and conventional stressors at gate lengths of 25 nm, highlighting the scalability of this approach for high performance SOI CMOS technology. AC drive currents of 1630muA/mum and 1190muA/mum have been demonstrated in 45 nm ground-rules at 1V and 200nA/mum off current for nFETs and pFETs, at a Tinv of 14...
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