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Nano-crystalline TiO2 films with an anatase phase were deposited by reactive medium frequency magnetron sputtering deposition. Such TiO2 films as anode for the dye-sensitized solar cells should be with a suitable porosity, two methods were used. One is change the tilt angle, i.e., the angle between sputtering beam direction and normal of the substrate, during film deposition. Another is regulating...
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