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In this study, we have successfully developed an industrially feasible stack rear Al2O3/SiNx and front SiO2/SiNx passivation layer PERC solar cells fabrication method based on the existing PERC sc‐silicon solar cells production line. The manufacturing parameters of the deposition processes were adapted to get the best passivation effect. The front SiO2/SiNx passivation layer deposition parameters...
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