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In this brief, the compensation for both the nonlinear hysteresis and the vibrational dynamics effects of piezo actuators is studied. Piezo actuators are the enabling device in many applications such as atomic force microscopy (AFM) to provide nano- to atomic-levels precision positioning. During high-speed, large-range positioning, however, large positioning errors can be generated due to the combined...
In this article, an inversion-based iterative control (IIC) approach is used to compensate for both the hysteresis and the vibrational dynamics effects of piezo actuators during high-speed, large-range tracking. We use the Hammerstein model to capture the piezo's input-output behavior and to show the convergence of the iterative control algorithm. The IIC approach is illustrated by applying it to...
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