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Nanocrystalline (Ti,Al)N thin films with different Al contents were prepared by alternatively sputtering Ti and Al targets in N 2 gas atmosphere at 600°C and by mutual diffusion between Ti and Al atoms during film deposition. The microstructure and mechanical properties of the thin films were investigated by X-ray diffraction, field emission scanning electron microscopy and nanoindenter. The...
To improve the magnetoelectric (ME) property of piezoelectric thin film systems, Ni and FeCoV magnetic films are respectively used to sandwich piezoelectric foil Pb(Mg1/3Nb2/3)O3–PbTiO3 (PMN–PT) in the middle. The ME voltages and coefficients have been characterized in the longitudinally magnetized and transversely polarized mode. The measurement was conducted under a static magnetic field superimposed...
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