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We fabricated and characterized on-chip Fabry–Pérot (FP) vapor sensors for the development of on-column micro-gas chromatography (μGC) detectors. The FP sensors were made by coating a thin layer of polymer on a silicon wafer. The air–polymer and polymer–silicon interfaces form an FP cavity, whose resonance wavelengths change in response to the vapor absorption/desorption, thus allowing for rapid detection...
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