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This paper presents ultrasonic embossing using silicon molds to replicate microstructures on Polymethyl Methacrylate (PMMA) substrates. The pattern of the silicon mold consists of micro grooves with different sizes. The molds were fabricated by wet etching, and both concave and convex types were fabricated. The effects of the processing parameters on replication quality, including average microstructure...
In order to improve the detection sensitivity of thermo-optic infrared focal plane arrays (TOFPA), we analyzed the optical characteristics of TOFPA and the influence of pairs of high/low index films (H/L, amorphous silicon and silicon nitride) with their extinction coefficients measured by spectroscopic ellipsometry. The results show that increasing the pairs initially increases and subsequently decreases...
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