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Intrinsic stress in amorphous hydrogenated carbon (a-C:H) coatings was reduced through addition of 10-20 sccm N 2 to the feed gas. The compressive stresses observed in this study were in the range -0.91 to -1.6 GPa. Approximately 2-3 at.% nitrogen was incorporated into the coatings as determined using elastic recoil detection (ERD). Raman spectroscopy shows that the G peak of samples made...
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