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Nanopore formation upon heat treatment of hydrocarbon-siliconoxide hybrid films was investigated by means of the variable-energy positron annihilation γ-ray and lifetime techniques. The films were prepared using plasma enhanced chemicalvapor deposition (PECVD),and nanoscopic poresinthe films weredeveloped throughthe decom positionofasacrificialhydrocarbonous porogenbyannealingthe filmsat temperaturesupto600...
Pore characteristics of SiOCH layers in fine-pitch Cu-damascene interconnects were studied using monoenergetic positron beams. Doppler broadening spectra of the annihilation radiation and lifetime spectra of positrons were measured for the samples fabricated with the line/space widths of 0.27/0.27 and 1.08/1.08 mum, respectively. From measurements of the positronium (Ps) lifetimes, the mean pore size...
An ideal porous methyl-silsesquioxane (MSQ) film for low-k dielectrics would consist of a network of small, closed pores with homogeneous size distribution. In this work, we studied the pore size and interconnectivity between pores for porous MSQ films templated with various types of triblock copolymers (pore generator) using positrons by measuring ortho-positronium (o-Ps) 3γ emission, Doppler broadening...
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